Effects of damages induced by indium-tin-oxide reactive plasma deposition on minority carrier lifetime in silicon crystal

A reactive-plasma deposition (RPD) process damage is evaluated for an indium-tin-oxide (ITO)/SiO2/Si structure in terms of the recombination properties at the interface. To calculate the surface recombination velocity (SRV), the defect density at the SiO2/Si interface (Dit), the effective total char...

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Détails bibliographiques
Auteurs principaux: Takefumi Kamioka, Yuki Isogai, Yutaka Hayashi, Yoshio Ohshita, Atsushi Ogura
Format: Article
Langue:English
Publié: AIP Publishing LLC 2019-10-01
Collection:AIP Advances
Accès en ligne:http://dx.doi.org/10.1063/1.5124903