Dynamic ultraviolet harmonic beam pattern control by programmable spatial wavefront modulation of near-infrared fundamental beam
The ultraviolet (UV) wavelength regime is attracting increasing attention because of its growing demand in semiconductor lithography, spectroscopy, and imaging applications owing to its high spatial resolution and high photon energy. However, beam shape control, beam delivery, and wavefront manipula...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2023-06-01
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| Series: | Nanophotonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/nanoph-2023-0300 |