Correlating Deposition Parameters with Structure and Properties of Nanoscale Multilayer (TiSi)N/CrN Coatings
Multilayer (TiSi)N/CrN coatings were fabricated through vacuum-arc deposition by applying the arc currents of (100 ÷ 110) A on TiSi cathode and (80 ÷ 90) A on Cr cathode, negative bias potential connected to the substrate holder of –(100 ÷ 200) V and reactive gas pressure of (0.03 ÷ 0.6) Pa. Applyi...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
V.N. Karazin Kharkiv National University Publishing
2022-06-01
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| Series: | East European Journal of Physics |
| Subjects: | |
| Online Access: | https://periodicals.karazin.ua/eejp/article/view/18538 |