An ultra high-endurance memristor using back-end-of-line amorphous SiC
Abstract Integrating resistive memory or neuromorphic memristors into mainstream silicon technology can be substantially facilitated if the memories are built in the back-end-of-line (BEOL) and stacked directly above the logic circuitries. Here we report a promising memristor employing a plasma-enha...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2024-06-01
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Series: | Scientific Reports |
Subjects: | |
Online Access: | https://doi.org/10.1038/s41598-024-64499-2 |