Formation of Mn4 Si7 films by magnetron sputtering and a wide range of their thermoelectric properties
In the paper, films of higher manganese silicide Mn4Si7 have been made and a lot of their properties have been investigated. The composition and structure of the films formed by ion-plasma magnetron sputtering were examined by scanning electron microscopy and X-ray analysis. The temperature dependen...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Peter the Great St.Petersburg Polytechnic University
2023-06-01
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| Series: | St. Petersburg Polytechnical University Journal: Physics and Mathematics |
| Subjects: | |
| Online Access: | https://physmath.spbstu.ru/article/2023.66.07/ |