Formation of Mn4 Si7 films by magnetron sputtering and a wide range of their thermoelectric properties

Formation of Mn4 Si7 films by magnetron sputtering and a wide range of their thermoelectric properties

In the paper, films of higher manganese silicide Mn4Si7 have been made and a lot of their properties have been investigated. The composition and structure of the films formed by ion-plasma magnetron sputtering were examined by scanning electron microscopy and X-ray analysis. The temperature dependen...

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Bibliographic Details
Main Authors: Bekpulatov Ilkhom, Loboda Vera, Normuradov Muradulla, Donaev Burkhon, Turapov Ilkhom
Format: Article
Language:English
Published: Peter the Great St.Petersburg Polytechnic University 2023-06-01
Series:St. Petersburg Polytechnical University Journal: Physics and Mathematics
Subjects:
magnetron sputtering
cleaning of silicon wafer
resistivity
silicon
thermoelectric properties
Online Access:https://physmath.spbstu.ru/article/2023.66.07/

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