Partially Etched Piezoelectric Film Filled with SiO<sub>2</sub> Structure Applied to A1 Mode Resonators for Transverse Modes Suppression

Partially Etched Piezoelectric Film Filled with SiO<sub>2</sub> Structure Applied to A1 Mode Resonators for Transverse Modes Suppression

With the arrival of the Fifth Generation (5G) communication era, there has been an urgent demand for acoustic filters with a high frequency and ultrawide bandwidth used in radio-frequency (RF) front-ends filtering and signal processing. First-order antisymmetric (A1) lamb mode resonators based on Li...

Full description

Bibliographic Details
Main Authors: Zhenyi Yu, Yu Guo, Sulei Fu, Baichuan Li, Peisen Liu, Shuai Zhang, Zongqin Sun
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Micromachines
Subjects:
A1 mode resonator
transverse modes suppression
partially etched piezoelectric film
comparison
finite element method
Online Access:https://www.mdpi.com/2072-666X/14/9/1745

Internet

https://www.mdpi.com/2072-666X/14/9/1745

Similar Items