Partially Etched Piezoelectric Film Filled with SiO<sub>2</sub> Structure Applied to A1 Mode Resonators for Transverse Modes Suppression
With the arrival of the Fifth Generation (5G) communication era, there has been an urgent demand for acoustic filters with a high frequency and ultrawide bandwidth used in radio-frequency (RF) front-ends filtering and signal processing. First-order antisymmetric (A1) lamb mode resonators based on Li...
Main Authors: | Zhenyi Yu, Yu Guo, Sulei Fu, Baichuan Li, Peisen Liu, Shuai Zhang, Zongqin Sun |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-09-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/9/1745 |
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