Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering

Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering

The paper presents the results of an investigation of the influence of technological parameters on the microstructure, optical, electrical and nanomechanical properties of zinc oxide coatings prepared using the pulsed reactive magnetron sputtering method. Three sets of ZnOx thin films were deposited...

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Bibliographic Details
Main Authors: Michał Mazur, Agata Obstarczyk, Witold Posadowski, Jarosław Domaradzki, Szymon Kiełczawa, Artur Wiatrowski, Damian Wojcieszak, Małgorzata Kalisz, Marcin Grobelny, Jan Szmidt
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Materials
Subjects:
ZnO thin film
pulsed reactive magnetron sputtering
hardness
scratch resistance
optical properties
electrical properties
Online Access:https://www.mdpi.com/1996-1944/15/19/6551

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https://www.mdpi.com/1996-1944/15/19/6551

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