Annealing-Modulated Surface Reconstruction for Self-Assembly of High-Density Uniform InAs/GaAs Quantum Dots on Large Wafers Substrate

In this work, we developed pre-grown annealing to form β2 reconstruction sites among β or α (2 × 4) reconstruction phase to promote nucleation for high-density, size/wafer-uniform, photoluminescence (PL)-optimal InAs quantum dot (QD) growth on a large GaAs wafer. Using this, the QD density reached 5...

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Bibliographic Details
Main Authors: Xiangjun Shang, Xiangbin Su, Hanqing Liu, Huiming Hao, Shulun Li, Deyan Dai, Mifeng Li, Ying Yu, Yu Zhang, Guowei Wang, Yingqiang Xu, Haiqiao Ni, Zhichuan Niu
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/13/13/1959