Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles
The present investigation focuses on the design and mathematical modeling of a microelectromechanical (MEMS) mode-localized based sensor/actuator system. This device incorporates a sensitive clamped–clamped shallow arch microbeam with an initial curvature shaped to resemble one of the first two symm...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-03-01
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| Series: | Mathematics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2227-7390/12/7/970 |