3D FEM Simulation and Analysis of Fractal Electrode-Based FBAR Resonator for Tetrachloroethene (PCE) Gas Detection
This paper presents the FEM modeling and simulation of a thin-film bulk acoustic resonator (FBAR) for a tetrachloroethene (PCE) gas-sensing application. A zinc oxide layer is used as a piezoelectric material; an aluminum layer is used as the electrode material in the structure of the FBAR. Polyisobu...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-09-01
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| Series: | Fractal and Fractional |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3110/6/9/491 |