Mechanism of Material Removal in Nanomachining of Fused Quartz using AFM Diamond Tip
Nanometer-scale machining experiments on fused quartz surfaces have been performed using an atomic force microscope combined with a two-axis capacitive force/displacement transducer. The minimum normal force fnP required to reproducibly form a groove was about 4.7 µN. The minimum critical...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2010-08-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_1015/_pdf/-char/en |