Mechanism of Material Removal in Nanomachining of Fused Quartz using AFM Diamond Tip
Nanometer-scale machining experiments on fused quartz surfaces have been performed using an atomic force microscope combined with a two-axis capacitive force/displacement transducer. The minimum normal force fnP required to reproducibly form a groove was about 4.7 µN. The minimum critical...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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The Japan Society of Mechanical Engineers
2010-08-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_1015/_pdf/-char/en |
| Summary: | Nanometer-scale machining experiments on fused quartz surfaces have been performed using an atomic force microscope combined with a two-axis capacitive force/displacement transducer. The minimum normal force fnP required to reproducibly form a groove was about 4.7 µN. The minimum critical normal force fnR, tangential force ftR and groove depth dgR when the material removal process began were found to be 33.7 µN, 18.7 µN, and 4.3 nm, respectively. Changes in the swelling ratio Rs and the ratio of force components at the critical normal force fnR can be used to detect a critical condition when the material deformation behavior changes from plastic deformation to material removal. |
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| ISSN: | 1881-3054 |