Enhanced Characteristics of Nondispersive Infrared CO2 Gas Sensor by Deposition of Hydrophobic Thin Film

This paper presents the NDIR CO2 gas sensor that has improved the sensitivity and also the accuracy by the deposition of thin hydrophobic film (Parylene-C film with 0.5 micrometer thick) onto the reflector surfaces of White-cell structure. After deposition of hydrophobic thin film, the sensitivity o...

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Bibliographic Details
Main Authors: Jinho Kim, Jayoung Lee, Keunheon Lee, Seunghwan Yi
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
Online Access:https://www.mdpi.com/2504-3900/1/4/410