DSCU-Net: MEMS Defect Detection Using Dense Skip-Connection U-Net

With the rapid development of intelligent manufacturing and electronic information technology, integrated circuits play a vital role in high-end chips. The semiconductor chip manufacturing process requires precise operation and strict control to ensure chip quality. The traditional manual visual ins...

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Bibliographic Details
Main Authors: Shang Wu, Yaxin Zhu, Pengchen Liang
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Symmetry
Subjects:
Online Access:https://www.mdpi.com/2073-8994/16/3/300