Design and simulation of the helicon plasma system with 1.5 kW RF power and 13.56 MHz frequency
In this paper, a Helicon plasma system with Nagoya Type III antenna was designed and simulated by using COMSOL Multiphysics 5.2. In our simulation, all effective interactions and parameters in the plasma production process are considered. Besides, the cross-sections of the reactions which are occurr...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | fas |
| Published: |
Nuclear Science and Technology Research Institute
2019-08-01
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| Series: | مجله علوم و فنون هستهای |
| Subjects: | |
| Online Access: | https://jonsat.nstri.ir/article_996_9567b1edaf2bfb002faf06d3b463ff22.pdf |