Development of biaxial active vibration suppression system with piezoelectric inertial actuator for electron microscope
Active vibration suppression should have high performance and has been studied and applied over the years. However, its practical applications are limited to large objects due to its implementation cost or design man-hour. In previous study, we proposed a distributed general-purpose active vibration...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2019-09-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/85/878/85_19-00161/_pdf/-char/en |