Effect of Drilling Parameters on Machining Performance in Drilling Polytetrafluoroethylene

Effect of Drilling Parameters on Machining Performance in Drilling Polytetrafluoroethylene

Polytetrafluoroethylene (PTFE) plays an important role in semiconductor manufacturing. It is an important processing material for the key sealing components in the field of immersion lithography. The lack of research related to the mechanical processing of PTFE leads to many challenges in producing...

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Bibliographic Details
Main Authors: Jing Ni, Xiaotian Zeng, M. S. H. Al-Furjan, Huijun Zhao, Liming Guan, Zhi Cui, Lidong Han
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Materials
Subjects:
polytetrafluoroethylene
cutting parameters
thrust
torque
drilling temperature
surface roughness
Online Access:https://www.mdpi.com/1996-1944/15/19/6922

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https://www.mdpi.com/1996-1944/15/19/6922

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