Dependence of Monocrystalline Sapphire Dicing on Crystal Orientation Using Picosecond Laser Bessel Beams

Dependence of Monocrystalline Sapphire Dicing on Crystal Orientation Using Picosecond Laser Bessel Beams

Dicing is a critical step in the manufacturing process for the application of sapphire. In this work, the dependence of sapphire dicing on crystal orientation using picosecond Bessel laser beam drilling combined with mechanical cleavage was studied. By using the above method, linear cleaving with on...

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Bibliographic Details
Main Authors: Qiuling Wen, Jinhong Chen, Guoqin Huang, Changcai Cui, Dekui Mu
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Micromachines
Subjects:
sapphire dicing
picosecond laser Bessel beam
crystal orientation
mechanical cleavage
Online Access:https://www.mdpi.com/2072-666X/14/4/772

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https://www.mdpi.com/2072-666X/14/4/772

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