A STUDY OF OPTICAL AND STRUCTURAL PROPERTIES OF a-Si:H AND a-SiC:H FILMS
Optical and structural properties of amorphous hydrogenated silicon and amorphous silicon carbide films were investigated. The procedure of determination of optical characteristics of films was demonstrated and its effectiveness for homogeneous films was proofed. It was shown, that carbon introducti...
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| Format: | Article |
| Language: | English |
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Al-Farabi Kazakh National University
2010-12-01
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| Series: | Вестник. Серия физическая |
| Online Access: | https://bph.kaznu.kz/index.php/zhuzhu/article/view/1004 |