A STUDY OF OPTICAL AND STRUCTURAL PROPERTIES OF a-Si:H AND a-SiC:H FILMS

A STUDY OF OPTICAL AND STRUCTURAL PROPERTIES OF a-Si:H AND a-SiC:H FILMS

Optical and structural properties of amorphous hydrogenated silicon and amorphous silicon carbide films were investigated. The procedure of determination of optical characteristics of films was demonstrated and its effectiveness for homogeneous films was proofed. It was shown, that carbon introducti...

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Bibliographic Details
Main Author:	S.M. Manakov
Format:	Article
Language:	English
Published:	Al-Farabi Kazakh National University 2010-12-01
Series:	Вестник. Серия физическая
Online Access:	https://bph.kaznu.kz/index.php/zhuzhu/article/view/1004

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