Research on a New Type of Rigid-Flexible Coupling 3-DOF Micro-Positioning Platform
A new type of rigid-flexible coupling three degrees of freedom (3-DOF) micro-positioning platform with high positioning accuracy and high bearing capacity is developed, which consists of flexible drive mechanism and rigid platform. The flexible drive mechanism consists of three sets of symmetrical p...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-11-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/11/1015 |