Optimization of a Fuze MEMS Setback Arming Device Based on the EDM Process

This paper introduces the working principle of a MEMS safety and arming (S&A) device and measures and tests a setback arming device. To solve the problem of large fabrication errors in the UV-LIGA process, a MEMS S&A fuze device fabricated by low-speed wire electrical discharge machi...

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Bibliographic Details
Main Authors: Yu Qin, Liangyu Chen, Yongping Hao
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9086033/