Multi-scale alignment to buried atom-scale devices using Kelvin probe force microscopy

Bibliographic Details
Main Authors:	Namboodiri Pradeep, Wyrick Jonathan, Stan Gheorghe, Wang Xiqiao, Fei Fan, Kashid Ranjit Vilas, Schmucker Scott W., Kasica Richard, Barnes Bryan M., Stewart Jr Michael D., Silver Richard M.
Format:	Article
Language:	English
Published:	De Gruyter 2024-02-01
Series:	Nanotechnology Reviews
Subjects:	atomic-scale devices scanning tunneling microscopy stm dopant device kelvin probe force microscopy
Online Access:	https://doi.org/10.1515/ntrev-2023-0196

Internet