Task failure prediction for wafer-handling robotic arms by using various machine learning algorithms
Industries are increasingly adopting automatic and intelligent manufacturing in production lines, such as those of semiconductor wafers, optoelectronic devices, and light-emitting diodes. For example, automatic robot arms have been used for pick-and-place workpiece applications. However, repairing a...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2021-05-01
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| Series: | Measurement + Control |
| Online Access: | https://doi.org/10.1177/00202940211003938 |