Low-temperature plasma magnetron discharge
The article investigates a low-temperature plasma of the magnetron discharge of a device used for the synthesis of dielectric films by reactive cathode sputtering. The aim of the study is to determine the temperature characteristics of plasma particles and a sputtered substance, as well as the mecha...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/1138 |
| _version_ | 1797880999028195328 |
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| author | I. Sh. Nevliudov D. V. Gurin V. N. Gurin K. L. Khrustalev |
| author_facet | I. Sh. Nevliudov D. V. Gurin V. N. Gurin K. L. Khrustalev |
| author_sort | I. Sh. Nevliudov |
| collection | DOAJ |
| description | The article investigates a low-temperature plasma of the magnetron discharge of a device used for the synthesis of dielectric films by reactive cathode sputtering. The aim of the study is to determine the temperature characteristics of plasma particles and a sputtered substance, as well as the mechanism for the formation of a chemical bond between sputtered atoms and active gas molecules. A study of the composition and energy parameters of the plasma, as well as the chemical composition of the particles obtained by sputtering, was carried out by a spectroscopic method. The quantitative composition was determined by a mass spectrometer to determine the composition of the sputtered particles. |
| first_indexed | 2024-04-10T03:13:11Z |
| format | Article |
| id | doaj.art-3461c30d88e04c9cb6e987479e6197cf |
| institution | Directory Open Access Journal |
| issn | 1729-7648 |
| language | Russian |
| last_indexed | 2024-04-10T03:13:11Z |
| publishDate | 2019-06-01 |
| publisher | Educational institution «Belarusian State University of Informatics and Radioelectronics» |
| record_format | Article |
| series | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| spelling | doaj.art-3461c30d88e04c9cb6e987479e6197cf2023-03-13T07:33:19ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482019-06-0108931001137Low-temperature plasma magnetron dischargeI. Sh. Nevliudov0D. V. Gurin1V. N. Gurin2K. L. Khrustalev3Kharkiv national university of radioelectronicsKharkiv national university of radioelectronicsKharkiv national university of radioelectronicsKharkiv national university of radioelectronicsThe article investigates a low-temperature plasma of the magnetron discharge of a device used for the synthesis of dielectric films by reactive cathode sputtering. The aim of the study is to determine the temperature characteristics of plasma particles and a sputtered substance, as well as the mechanism for the formation of a chemical bond between sputtered atoms and active gas molecules. A study of the composition and energy parameters of the plasma, as well as the chemical composition of the particles obtained by sputtering, was carried out by a spectroscopic method. The quantitative composition was determined by a mass spectrometer to determine the composition of the sputtered particles.https://doklady.bsuir.by/jour/article/view/1138magnetron chambermass spectrometrynitrogen plasmaatomizationargon plasma |
| spellingShingle | I. Sh. Nevliudov D. V. Gurin V. N. Gurin K. L. Khrustalev Low-temperature plasma magnetron discharge Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki magnetron chamber mass spectrometry nitrogen plasma atomization argon plasma |
| title | Low-temperature plasma magnetron discharge |
| title_full | Low-temperature plasma magnetron discharge |
| title_fullStr | Low-temperature plasma magnetron discharge |
| title_full_unstemmed | Low-temperature plasma magnetron discharge |
| title_short | Low-temperature plasma magnetron discharge |
| title_sort | low temperature plasma magnetron discharge |
| topic | magnetron chamber mass spectrometry nitrogen plasma atomization argon plasma |
| url | https://doklady.bsuir.by/jour/article/view/1138 |
| work_keys_str_mv | AT ishnevliudov lowtemperatureplasmamagnetrondischarge AT dvgurin lowtemperatureplasmamagnetrondischarge AT vngurin lowtemperatureplasmamagnetrondischarge AT klkhrustalev lowtemperatureplasmamagnetrondischarge |