Elements of solid state electronics based on soi-structures and si whiskers for cryogenic temperatures
The paper presents the study results of electrical properties of polycrystalline silicon films in silicon-on-insulator structures and Si whiskers in the temperature range of 4,2—70 K obtained by impedance measurements in the frequency range from 10 Hz to 250 kHz and the possibility of their use in s...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Politehperiodika
2014-12-01
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Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
Subjects: | |
Online Access: | http://www.tkea.com.ua/tkea/2014/5-6_2014/pdf/07.pdf |