Elements of solid state electronics based on soi-structures and si whiskers for cryogenic temperatures

The paper presents the study results of electrical properties of polycrystalline silicon films in silicon-on-insulator structures and Si whiskers in the temperature range of 4,2—70 K obtained by impedance measurements in the frequency range from 10 Hz to 250 kHz and the possibility of their use in s...

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Bibliographic Details
Main Authors: Druzhinin A. A., Osrovskkii I. P., Khoverko Yu. M., Koretskyy R. N.
Format: Article
Language:English
Published: Politehperiodika 2014-12-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Subjects:
Online Access:http://www.tkea.com.ua/tkea/2014/5-6_2014/pdf/07.pdf