Plasma-Assisted Atomic Layer Deposition of IrO<sub>2</sub> for Neuroelectronics
In vitro and in vivo stimulation and recording of neuron action potential is currently achieved with microelectrode arrays, either in planar or 3D geometries, adopting different materials and strategies. IrO<sub>2</sub> is a conductive oxide known for its excellent biocompatibility, good...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-03-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/13/6/976 |