Plasma-Assisted Atomic Layer Deposition of IrO<sub>2</sub> for Neuroelectronics

Plasma-Assisted Atomic Layer Deposition of IrO<sub>2</sub> for Neuroelectronics

In vitro and in vivo stimulation and recording of neuron action potential is currently achieved with microelectrode arrays, either in planar or 3D geometries, adopting different materials and strategies. IrO<sub>2</sub> is a conductive oxide known for its excellent biocompatibility, good...

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Bibliographic Details
Main Authors:	Valerio Di Palma, Andrea Pianalto, Michele Perego, Graziella Tallarida, Davide Codegoni, Marco Fanciulli
Format:	Article
Language:	English
Published:	MDPI AG 2023-03-01
Series:	Nanomaterials
Subjects:	pseudocapacitive atomic layer deposition IrO<sub>2</sub> neuroelectronics
Online Access:	https://www.mdpi.com/2079-4991/13/6/976

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