Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array

Compared to conventional ultrasonic flowmeters using multiple transducers, this paper reports, for the first time, an airflow volumetric flowmeter using a signal PMUT array to measure the flow rate in a rectangular pipe. The PMUT around 200 kHz is selected to fit the system requirements. All PMUT el...

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Bibliographic Details
Main Authors: Xueying Xiu, Haolin Yang, Meilin Ji, Haochen Lv, Songsong Zhang
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/11/1979