Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array
Compared to conventional ultrasonic flowmeters using multiple transducers, this paper reports, for the first time, an airflow volumetric flowmeter using a signal PMUT array to measure the flow rate in a rectangular pipe. The PMUT around 200 kHz is selected to fit the system requirements. All PMUT el...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-11-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/11/1979 |
| _version_ | 1797464477947396096 |
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| author | Xueying Xiu Haolin Yang Meilin Ji Haochen Lv Songsong Zhang |
| author_facet | Xueying Xiu Haolin Yang Meilin Ji Haochen Lv Songsong Zhang |
| author_sort | Xueying Xiu |
| collection | DOAJ |
| description | Compared to conventional ultrasonic flowmeters using multiple transducers, this paper reports, for the first time, an airflow volumetric flowmeter using a signal PMUT array to measure the flow rate in a rectangular pipe. The PMUT around 200 kHz is selected to fit the system requirements. All PMUT elements on this single array are then electrically grouped into transmitter and receiver. In order to minimize the crosstalk signal between transmitter and receiver, a phase shift signal is applied at the transmitter to reduce the amplitude of the crosstalk signal by 87.8%, hence, the resultant high sensing resolution. Based on the analog signal extracted from the single PMUT array, a complete flow sensing system is built by using the cross-correlation method and cosine interpolation, whereby the change in flow rate is reflected by the time of flight difference (dTof) recorded at the receiver. Meanwhile, the acoustic path self-calibration is realized by using multiple echoes. Compared with the previously reported MEMS flowmeters with dual or multiple PMUT devices, this paper proposes a single PMUT array flow sensing system, which is able to measure the flow rate changes up to 4 m<sup>3</sup>/h. With the implementation of a single device, the problem of ultrasound device/reflector misalignment during system setup is completely eradicated. |
| first_indexed | 2024-03-09T18:08:44Z |
| format | Article |
| id | doaj.art-34d4a39b1df04e05aa4f19228c763c09 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T18:08:44Z |
| publishDate | 2022-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-34d4a39b1df04e05aa4f19228c763c092023-11-24T09:15:49ZengMDPI AGMicromachines2072-666X2022-11-011311197910.3390/mi13111979Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) ArrayXueying Xiu0Haolin Yang1Meilin Ji2Haochen Lv3Songsong Zhang4School of Microelectronics, Shanghai University, Shanghai 201800, ChinaSchool of Microelectronics, Shanghai University, Shanghai 201800, ChinaSchool of Microelectronics, Shanghai University, Shanghai 201800, ChinaShanghai Industrial μTechnology Research Institute, Shanghai 201899, ChinaSchool of Microelectronics, Shanghai University, Shanghai 201800, ChinaCompared to conventional ultrasonic flowmeters using multiple transducers, this paper reports, for the first time, an airflow volumetric flowmeter using a signal PMUT array to measure the flow rate in a rectangular pipe. The PMUT around 200 kHz is selected to fit the system requirements. All PMUT elements on this single array are then electrically grouped into transmitter and receiver. In order to minimize the crosstalk signal between transmitter and receiver, a phase shift signal is applied at the transmitter to reduce the amplitude of the crosstalk signal by 87.8%, hence, the resultant high sensing resolution. Based on the analog signal extracted from the single PMUT array, a complete flow sensing system is built by using the cross-correlation method and cosine interpolation, whereby the change in flow rate is reflected by the time of flight difference (dTof) recorded at the receiver. Meanwhile, the acoustic path self-calibration is realized by using multiple echoes. Compared with the previously reported MEMS flowmeters with dual or multiple PMUT devices, this paper proposes a single PMUT array flow sensing system, which is able to measure the flow rate changes up to 4 m<sup>3</sup>/h. With the implementation of a single device, the problem of ultrasound device/reflector misalignment during system setup is completely eradicated.https://www.mdpi.com/2072-666X/13/11/1979PMUT arrayultrasonic flowmetercross-correlation |
| spellingShingle | Xueying Xiu Haolin Yang Meilin Ji Haochen Lv Songsong Zhang Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array Micromachines PMUT array ultrasonic flowmeter cross-correlation |
| title | Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array |
| title_full | Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array |
| title_fullStr | Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array |
| title_full_unstemmed | Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array |
| title_short | Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array |
| title_sort | development of mems airflow volumetric flow sensing system with single piezoelectric micromachined ultrasonic transducer pmut array |
| topic | PMUT array ultrasonic flowmeter cross-correlation |
| url | https://www.mdpi.com/2072-666X/13/11/1979 |
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