Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking
This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF). The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA). The SMA spiral coil forms an indu...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2014-07-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/14/7/12399 |