Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking
This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF). The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA). The SMA spiral coil forms an indu...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2014-07-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/14/7/12399 |
| _version_ | 1798024526805598208 |
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| author | Mohamed Sultan Mohamed Ali Alaa AbuZaiter Colin Schlosser Brad Bycraft Kenichi Takahata |
| author_facet | Mohamed Sultan Mohamed Ali Alaa AbuZaiter Colin Schlosser Brad Bycraft Kenichi Takahata |
| author_sort | Mohamed Sultan Mohamed Ali |
| collection | DOAJ |
| description | This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF). The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA). The SMA spiral coil forms an inductor-capacitor resonant circuit that is excited using external RF magnetic fields to thermally actuate the coil. The actuation causes a shift in the circuit’s resonance as the coil is displaced vertically, which is wirelessly monitored through an external antenna to track the displacements. Controlled actuation and displacement monitoring using the developed method is demonstrated with the microfabricated device. The device exhibits a frequency sensitivity to displacement of 10 kHz/µm or more for a full out-of-plane travel range of 466 µm and an average actuation velocity of up to 155 µm/s. The method described permits the actuator to have a self-sensing function that is passively operated, thereby eliminating the need for separate sensors and batteries on the device, thus realizing precise control while attaining a high level of miniaturization in the device. |
| first_indexed | 2024-04-11T18:03:59Z |
| format | Article |
| id | doaj.art-34deb70cb4084ea7939898c7b4244f60 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T18:03:59Z |
| publishDate | 2014-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-34deb70cb4084ea7939898c7b4244f602022-12-22T04:10:22ZengMDPI AGSensors1424-82202014-07-01147123991240910.3390/s140712399s140712399Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency TrackingMohamed Sultan Mohamed Ali0Alaa AbuZaiter1Colin Schlosser2Brad Bycraft3Kenichi Takahata4Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Skudai, Johor 81310, MalaysiaFaculty of Electrical Engineering, Universiti Teknologi Malaysia, Skudai, Johor 81310, MalaysiaDepartment of Electrical and Computer Engineering, The University of British Columbia, 2332 Main Mall, Vancouver, BC V6T 1Z4, CanadaDepartment of Electrical and Computer Engineering, The University of British Columbia, 2332 Main Mall, Vancouver, BC V6T 1Z4, CanadaDepartment of Electrical and Computer Engineering, The University of British Columbia, 2332 Main Mall, Vancouver, BC V6T 1Z4, CanadaThis paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF). The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA). The SMA spiral coil forms an inductor-capacitor resonant circuit that is excited using external RF magnetic fields to thermally actuate the coil. The actuation causes a shift in the circuit’s resonance as the coil is displaced vertically, which is wirelessly monitored through an external antenna to track the displacements. Controlled actuation and displacement monitoring using the developed method is demonstrated with the microfabricated device. The device exhibits a frequency sensitivity to displacement of 10 kHz/µm or more for a full out-of-plane travel range of 466 µm and an average actuation velocity of up to 155 µm/s. The method described permits the actuator to have a self-sensing function that is passively operated, thereby eliminating the need for separate sensors and batteries on the device, thus realizing precise control while attaining a high level of miniaturization in the device.http://www.mdpi.com/1424-8220/14/7/12399wireless displacement sensingspiral-coilmicro-electro-mechanical systemsmicroactuatorsresonant circuit |
| spellingShingle | Mohamed Sultan Mohamed Ali Alaa AbuZaiter Colin Schlosser Brad Bycraft Kenichi Takahata Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking Sensors wireless displacement sensing spiral-coil micro-electro-mechanical systems microactuators resonant circuit |
| title | Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking |
| title_full | Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking |
| title_fullStr | Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking |
| title_full_unstemmed | Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking |
| title_short | Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking |
| title_sort | wireless displacement sensing of micromachined spiral coil actuator using resonant frequency tracking |
| topic | wireless displacement sensing spiral-coil micro-electro-mechanical systems microactuators resonant circuit |
| url | http://www.mdpi.com/1424-8220/14/7/12399 |
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