Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking

Wireless Displacement Sensing of Micromachined Spiral-Coil Actuator Using Resonant Frequency Tracking

This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF). The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA). The SMA spiral coil forms an indu...

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Bibliographic Details
Main Authors: Mohamed Sultan Mohamed Ali, Alaa AbuZaiter, Colin Schlosser, Brad Bycraft, Kenichi Takahata
Format: Article
Language:English
Published: MDPI AG 2014-07-01
Series:Sensors
Subjects:
wireless displacement sensing
spiral-coil
micro-electro-mechanical systems
microactuators
resonant circuit
Online Access:http://www.mdpi.com/1424-8220/14/7/12399

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