Influence of Dynamic Accuracy Constraints of Manipulator of Wafer Transmission Robot on Scheduling and Control of Single-Armed Cluster Tools
The wafer transfer robot is a key part of integrated circuit equipment which performs the transit of wafers precisely, quickly and steadily. The dynamic accuracy of the manipulator of the wafer transfer robot directly affects the quality of transferring and processing wafers and even the scheduling...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2023-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10023484/ |