Automated alignment in mask‐free photolithography enabled by micro‐LED arrays
Abstract We present an automated control system for micro scale positioning, based on single pixel imaging and fluorescence. By projecting a chequerboard array of CMOS controllable μ‐LEDs at a suitable wavelength, we are able to spatially locate, track and automatically align to fluorescent markers....
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2021-09-01
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| Series: | Electronics Letters |
| Subjects: | |
| Online Access: | https://doi.org/10.1049/ell2.12244 |