Sputtered of ZnO:Al thin Films for Application in Photovoltaic Solar Cells
High transparent and conductive, aluminium - doped zinc oxide thin films (ZnO:Al), were prepared by radio –frequency (RF) diode sputtering from ZnO+2 wt. % Al2O3 target on Eutal glass substrates. Surfaces of the samples weretreated by various technological steps during preparation. The ion bombardme...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
VSB-Technical University of Ostrava
2008-01-01
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| Series: | Advances in Electrical and Electronic Engineering |
| Subjects: | |
| Online Access: | http://advances.utc.sk/index.php/AEEE/article/view/109 |