Effect of sulfuric acid concentration on the quality of copper microcolumns in localized electrochemical deposition
Localized electrochemical deposition (LECD) is a promising method for three-dimensional micro-/nanofabrication and, thus, the factors influencing LECD have been intensively investigated. This study examined the effect of sulfuric acid concentration on copper microcolumns deposited by LECD using a mi...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2020-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/ab8f77 |