Area-Selective, In-Situ Growth of Pd-Modified ZnO Nanowires on MEMS Hydrogen Sensors
Nanomaterials are widely utilized as sensing materials in semiconductor gas sensors. As sensor sizes continue to shrink, it becomes increasingly challenging to construct micro-scale sensing materials on a micro-sensor with good uniformity and stability. Therefore, in-situ growth with a desired patte...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-03-01
|
| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/12/6/1001 |