Area-Selective, In-Situ Growth of Pd-Modified ZnO Nanowires on MEMS Hydrogen Sensors

Area-Selective, In-Situ Growth of Pd-Modified ZnO Nanowires on MEMS Hydrogen Sensors

Nanomaterials are widely utilized as sensing materials in semiconductor gas sensors. As sensor sizes continue to shrink, it becomes increasingly challenging to construct micro-scale sensing materials on a micro-sensor with good uniformity and stability. Therefore, in-situ growth with a desired patte...

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Bibliographic Details
Main Authors: Jiahao Hu, Tao Zhang, Ying Chen, Pengcheng Xu, Dan Zheng, Xinxin Li
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Nanomaterials
Subjects:
in-situ growth
area-selective
MEMS
H<sub>2</sub> sensor
micro-hotplate
Online Access:https://www.mdpi.com/2079-4991/12/6/1001

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