3-D Self-Aligned Stacked Ge Nanowire pGAAFET on Si nFinFET of Single Gate CFET
In this study, we propose a self-aligned stacked Ge nanowire (NW) p-type gate-all-around field-effect transistor (pGAAFET) on Si nFinFET of single gate complementary FET (CFET). The self-aligned stacked Ge NW pGAAFET on Si nFinFET of single gate CFET device is fabricated on a SOI wafer. The CFET dev...
Main Authors: | Yi-Wen Lin, Shan-Wen Lin, Bo-An Chen, Chong-Jhe Sun, Siao-Cheng Yan, Guang-Li Luo, Yung-Chun Wu, Fu-Ju Hou |
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Format: | Article |
Language: | English |
Published: |
IEEE
2023-01-01
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Series: | IEEE Journal of the Electron Devices Society |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/10233696/ |
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