A Study on Greenhouse Gas (PFCs) Reduction in Plasma Scrubbers to Realize Carbon Neutrality of Semiconductors and Displays
Perfluorinated compounds (PFCs) are used for manufacturing purposes in the semiconductor and display industries, resulting in an increased need for emission reduction due to the significant global warming potential of the associated greenhouse gases. The decomposition characteristics of etch-type an...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-07-01
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| Series: | Atmosphere |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4433/14/8/1220 |