Pure Nano-Rotation Scanner
We developed and tested a novel rotation scanner for nano resolution and accurate rotary motion about the rotation center. The scanner consists of circular hinges and leaf springs so that the parasitic error at the center of the scanner in the X and Y directions is minimized, and rotation performanc...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2012-01-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1155/2012/962439 |