Pure Nano-Rotation Scanner
We developed and tested a novel rotation scanner for nano resolution and accurate rotary motion about the rotation center. The scanner consists of circular hinges and leaf springs so that the parasitic error at the center of the scanner in the X and Y directions is minimized, and rotation performanc...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2012-01-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1155/2012/962439 |
| _version_ | 1819315644109160448 |
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| author | Moo-Yeon Lee Eun-Joo Park Jeong-Kuk Yeom Dong-Pyo Hong Dong-Yeon Lee |
| author_facet | Moo-Yeon Lee Eun-Joo Park Jeong-Kuk Yeom Dong-Pyo Hong Dong-Yeon Lee |
| author_sort | Moo-Yeon Lee |
| collection | DOAJ |
| description | We developed and tested a novel rotation scanner for nano resolution and accurate rotary motion about the rotation center. The scanner consists of circular hinges and leaf springs so that the parasitic error at the center of the scanner in the X and Y directions is minimized, and rotation performance is optimized. Each sector of the scanner's system was devised to have nano resolution by minimizing the parasitic errors of the rotation center that arise due to displacements other than rotation. The analytic optimal design results of the proposed scanner were verified using finite element analyses. The piezoelectric actuators were used to attain nano-resolution performances, and a capacitive sensor was used to measure displacement. A feedback controller was used to minimize the rotation errors in the rotation scanner system under practical conditions. Finally, the performance evaluation test results showed that the resonance frequency was 542 Hz, the resolution was 0.09 μ rad, and the rotation displacement was 497.2 μ rad. Our test results revealed that the rotation scanner exhibited accurate rotation about the center of the scanner and had good nano precision. |
| first_indexed | 2024-12-24T10:03:23Z |
| format | Article |
| id | doaj.art-35ddf9b08a294c46b63301cbcd3b3e75 |
| institution | Directory Open Access Journal |
| issn | 1687-8132 |
| language | English |
| last_indexed | 2024-12-24T10:03:23Z |
| publishDate | 2012-01-01 |
| publisher | SAGE Publishing |
| record_format | Article |
| series | Advances in Mechanical Engineering |
| spelling | doaj.art-35ddf9b08a294c46b63301cbcd3b3e752022-12-21T17:00:55ZengSAGE PublishingAdvances in Mechanical Engineering1687-81322012-01-01410.1155/2012/96243910.1155_2012/962439Pure Nano-Rotation ScannerMoo-Yeon Lee0Eun-Joo Park1Jeong-Kuk Yeom2Dong-Pyo Hong3Dong-Yeon Lee4 Department of Mechanical Engineering, Dong-A University, Busan 604-714, Republic of Korea School of Mechanical Engineering, Yeungnam University, Gyeongsan 712-749, Republic of Korea Department of Mechanical Engineering, Dong-A University, Busan 604-714, Republic of Korea Department of Mechanical System Engineering, Chonbuk National University, Jeonju-si 561-756, Republic of Korea School of Mechanical Engineering, Yeungnam University, Gyeongsan 712-749, Republic of KoreaWe developed and tested a novel rotation scanner for nano resolution and accurate rotary motion about the rotation center. The scanner consists of circular hinges and leaf springs so that the parasitic error at the center of the scanner in the X and Y directions is minimized, and rotation performance is optimized. Each sector of the scanner's system was devised to have nano resolution by minimizing the parasitic errors of the rotation center that arise due to displacements other than rotation. The analytic optimal design results of the proposed scanner were verified using finite element analyses. The piezoelectric actuators were used to attain nano-resolution performances, and a capacitive sensor was used to measure displacement. A feedback controller was used to minimize the rotation errors in the rotation scanner system under practical conditions. Finally, the performance evaluation test results showed that the resonance frequency was 542 Hz, the resolution was 0.09 μ rad, and the rotation displacement was 497.2 μ rad. Our test results revealed that the rotation scanner exhibited accurate rotation about the center of the scanner and had good nano precision.https://doi.org/10.1155/2012/962439 |
| spellingShingle | Moo-Yeon Lee Eun-Joo Park Jeong-Kuk Yeom Dong-Pyo Hong Dong-Yeon Lee Pure Nano-Rotation Scanner Advances in Mechanical Engineering |
| title | Pure Nano-Rotation Scanner |
| title_full | Pure Nano-Rotation Scanner |
| title_fullStr | Pure Nano-Rotation Scanner |
| title_full_unstemmed | Pure Nano-Rotation Scanner |
| title_short | Pure Nano-Rotation Scanner |
| title_sort | pure nano rotation scanner |
| url | https://doi.org/10.1155/2012/962439 |
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