SEM Image Quality Assessment Based on Intuitive Morphology and Deep Semantic Features
The widespread use of scanning electron microscopy (SEM) has increased the requirements for SEM image quality. SEM images obtained by electron beam feedback have more complex texture features than natural images obtained by optical imaging, and this condition results in poor performance of algorithm...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2022-01-01
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Series: | IEEE Access |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9926051/ |