SEM Image Quality Assessment Based on Intuitive Morphology and Deep Semantic Features

SEM Image Quality Assessment Based on Intuitive Morphology and Deep Semantic Features

The widespread use of scanning electron microscopy (SEM) has increased the requirements for SEM image quality. SEM images obtained by electron beam feedback have more complex texture features than natural images obtained by optical imaging, and this condition results in poor performance of algorithm...

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Bibliographic Details
Main Authors: Haoran Wang, Shiyin Li, Jicun Ding, Suyan Li, Liang Dong, Zhaolin Lu
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Access
Subjects:
Image quality assessment
no-reference
SEM image
texture representation
semantic information
Online Access:https://ieeexplore.ieee.org/document/9926051/

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