Continuum and Molecular Modeling of Chemical Vapor Deposition at Nano-Scale Fibrous Substrates

Chemical vapor deposition (CVD) is a common industrial process that incorporates a complex combination of fluid flow, chemical reactions, and surface deposition. Understanding CVD processes requires rigorous and costly experimentation involving multiple spatial scales, from meters to nanometers. The...

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Bibliographic Details
Main Authors: Himel Barua, Alex Povitsky
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Mathematical and Computational Applications
Subjects:
Online Access:https://www.mdpi.com/2297-8747/28/6/112