The straightforward fabrication of thin silicide layers at low temperatures by employing the molecular-incident reaction effect
Because of the ease of formation, and good lattice match with Si, metal silicides often form high-quality epitaxial layers and have established themselves over the years as important technological materials with industrial applications. For the fabrication of silicon-based devices, the contact betwe...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-08-01
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| Series: | Results in Physics |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379722004442 |