Resonant-Type Piezoelectric Pump Driven by Piezoelectric Stacks and a Rhombic Micro Displacement Amplifier
To obtain a high flow rate, a resonant-type piezoelectric pump is designed, fabricated, and studied in this paper. The pump consists of four parts: a piezoelectric vibrator, a pump chamber, a check valve and a compressible space. The designed piezoelectric vibrator is composed of a rhombic micro dis...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-09-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/9/1764 |