Resonant-Type Piezoelectric Pump Driven by Piezoelectric Stacks and a Rhombic Micro Displacement Amplifier

To obtain a high flow rate, a resonant-type piezoelectric pump is designed, fabricated, and studied in this paper. The pump consists of four parts: a piezoelectric vibrator, a pump chamber, a check valve and a compressible space. The designed piezoelectric vibrator is composed of a rhombic micro dis...

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Bibliographic Details
Main Authors: Chunli Zhu, Xiaolong Shu, Dongcai Liu, Xianghan Du, Lexi Li, Qiaosheng Pan
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/9/1764